Gas Mixing Systems
CGM-2F
GSL-3F-SS
GSL-ALD4
CGM-2F is a compact two-channel trace gas mixer for inert gas control in small tube furnaces, glove boxes, plasma cleaner, small PECVD system. This mixer regulates both line pressure and flow rate, and assures that you get the precise mixture at a lower cost and compact design. You can easily adapt this unit to most operations in atmospheric chambers.
ALD-GSL-4 is a two channels precision ALD precursor delivery unit with four channels MFC gas mixing and delivery system, which is designed for DIY an ALD coating system with any furnace or chamber for thin film growth and powder surface coating. The LCD touch screen provides easy control for ALD puls time and gas flow for each channel.
The GSL-3F-SS is designed to mix and deliver 3 different gases to the MTI CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters.
2979,8 € (net)
Price: RFQ
912,1 € (net)
You can find all MTI Gas Mixing Systems here: