PECVD Furnace
OTF-1200X-S50-PESL
OTF-1200X-PEC4LV
OTF-1200X-II-PECS4L-LD
OTF-1200X-50S-PESL is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with a slideable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace, and the integrated slidable rail which allows you to preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to an advanced model with options. It is an ideal tool for the researcher to make innovations under a limited budget.
OTF-1200X-II-PEC4SL is a multi-zone slidable PE-CVD tube furnace system consisting of a 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene with the following benefits:
- Lower temperature processing compared to conventional CVD
- High heating & cooling rate using a sliding furnace
- Each heating zone to create a thermal gradient up to 200ºC
- 1100ºC Max. working temperature
- Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and single-layer graphene
OTF-1200X-PEC4LV is acompact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid-state, and benefits:
- Lower temperature processing compared to conventional CVD.
- Film stress can be controlled by high/low frequency mixing techniques.
- Control over stoichiometry via process conditions.
- Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Price: RFQ
Price: RFQ
Price: RFQ
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